ATMOSPHERIC PLASMA

 
 
OntosTT
Stand Alone Atmospheric Plasma System

 

 

The OntosTT, proposed in 2 versions - 200 mm and 300 mm , is a table-top semi-automatic Atmospheric Plasma System for surface preparation.

2 sizes of Plasma head are available - 25 mm and 40 mm.

It provides a simple, effective, clean surface modification method which does not require the throughput-robbing vacuum chamber associated with traditional plasma systems.

It performs this surface modification without ion bombardment and without the cross-contamination issues often associated with conventional plasma systems.

 

 

 

 

 

 

 

 

 

OntosIS (OEM)
Atmospheric Plasma Head for Integration into Third Party Equipment

 

The OEM version of the Ontos Plasma Head is available for integration into third party equipment.

2 sizes of Plasma head are available - 25 mm and 40 mm.

The OntosIS system is available on our FC300 Flip-Chip Bonder.

 

 

 

 

Key Benefits

 
   Downstream radical chemistry only
 
   CMOS safe, detector safe
 
   Fast process  continuous throughput capable
 
   Non-toxic, dry process. OSHA and EPA-friendly
 
 
 

 

Technical Data

 

Click here to request the OntosTT Datasheet.

 

 

Applications

 

  Surface preparation for bonding

  Photoresist residue removal

   Photomask cleaning

   Native oxide removal from semiconductor surfaces

   Organic contamination removal prior to adhesive bonding

   Pre-plating surface preparation